Archivio Istituzionale della RicercaThe study of creep in MEMS is crucial for their lifetime prediction and reliability evaluation. The experimental approaches used in macromechanics can be extended to the microscale if their effectiveness is proved by dedicated experiments. This goal may provide more general validity of creep effects prediction in MEMS, instead of spotted experiments on single devices like those ones reported in most of the work presented in literature. The demonstration of the validity of some established creep models and experimental methodologies also in the micromechanics is the goal of this paper.
Creep in MEMS / Soma', Aurelio; DE PASQUALE, Giorgio; Saleem, MUHAMMAD MUBASHER. - STAMPA. - (2014), pp. 13-16. (Intervento presentato al convegno Symposium on Design, Testing, Integration, and Packaging of MEMS/MOEMS (DTIP) 2014 tenutosi a Cannes, France nel 2-4 April 2014).
Creep in MEMS
SOMA', AURELIO;DE PASQUALE, GIORGIO;SALEEM, MUHAMMAD MUBASHER
2014
Abstract
The study of creep in MEMS is crucial for their lifetime prediction and reliability evaluation. The experimental approaches used in macromechanics can be extended to the microscale if their effectiveness is proved by dedicated experiments. This goal may provide more general validity of creep effects prediction in MEMS, instead of spotted experiments on single devices like those ones reported in most of the work presented in literature. The demonstration of the validity of some established creep models and experimental methodologies also in the micromechanics is the goal of this paper.
Pubblicazioni consigliate
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
https://hdl.handle.net/11583/2542512
Attenzione
Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo